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iCADA Suite

Intelligent control and analysis for durable assurance.

Comprehensive Solutions for Advanced Durables, Reticle, and Probe Cards Management

The iCADA Suite offers advanced solutions for managing durables, reticles, and probe cards across all lifecycle stages. From usage to storage, inspection, and maintenance, it helps optimize material utilization, reduce risks, and ensure production quality. With real-time tracking, streamlined workflows, and centralized access, iCADA Suite enhances efficiency and extends the lifetime of critical assets in semiconductor manufacturing.

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Reticle Management in Semiconductor Manufacturing

Reticles are essential photomasks used in photolithography to transfer circuit patterns onto silicon wafers. Given their critical role and high cost, effective reticle management is key to maintaining production quality and yield in semiconductor fabs.

Key challenges in reticle management:

  • Preventing contamination, defects, and damage during handling and storage.
  • Managing reticle wear from repeated use through regular inspection and cleaning.
  • Ensuring correct reticle usage and tracking to avoid production errors.
  • Reducing costs through efficient reticle tracking and maintenance.

Modular Solutions for Intelligent Control, Analysis, and Durables Management

The iCADA Suite covers the entire lifecycle of essential production assets, including tracking, inspection, validation, and maintenance, to ensure seamless operation and controlled processes in semiconductor fabs. Its modular approach enables manufacturers to adapt and scale according to production needs, with solutions that integrate easily into existing environments and support long-term growth.

iCADA RTCL

Reticle Lifecycle Management

Extensive management of reticle life cycles to ensure haze control and crystal growth prevention.

iCADA INSP

Reticle Inspection Management

Centralized system for reviewing and analyzing reticle inspection results from multiple tools and sources. Add-on of iCADA RTCL.

iCADA PCRD

Probe Card Management

Centralized solution for managing probe cards and assemblies, supporting efficient maintenance and operation.

iCADA DRBL

Durables Management

Complete lifecycle management for all durables, ensuring optimal usage and maintenance.

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iCADA Suite

Features Highlight

  • End-to-End Traceability
  • Automated Inspection and Analysis
  • Smart Maintenance Planning
  • Mask Vendor Connectivity (MaVen)
  • Seamless Integration
  • Configurable Workflows and Business Rules
  • Cost Control through Optimized Reticle Utilization
Download iCADA Suite datasheet
camLine_Datasheet_iCADA_202510_Internal
iCADA Suite

Features Highlight

  • End-to-End Traceability
  • Automated Inspection and Analysis
  • Smart Maintenance Planning
  • Mask Vendor Connectivity (MaVen)
  • Seamless Integration
  • Configurable Workflows and Business Rules
  • Cost Control through Optimized Reticle Utilization
Download iCADA Suite datasheet

Integrated Solutions to Strengthen Reticle Management

With iCADA Suite, semiconductor manufacturers gain a comprehensive Reticle Lifecycle Management (RLM) solution. Now part of camLine, iCADA extends its capabilities by seamlessly connecting to camLine’s solutions — enabling a fully integrated and automated workflow for reticle, probe card, and durables management.

Diagram of iCADA RTCL Lithography Operation Integration, illustrating key features such as MES host integration and automation, collaboration with mask shop, reticle pod management, reticle dispatch and delivery, reticle tracking and control, and reticle inspection and repair.

  • Manage recipes, production resources, and maintain equipment setup according to recipes to ensure proper reticle usage and integration with lithography tools, enabled by the advanced recipe management solution (LineWorks RM).

  • Coordinate with mask shops and ensure incoming reticle quality through automated validation and communication, powered by the supplier quality management solution (LineWorks SQM).

  • Control material flows and track how reticles are transported — know where they come from and where they are going, ensuring real-time coordination on the shop floor with the next generation material control system (RACE MCS™), supporting seamless reticle dispatch and delivery.

camLine
Leading global supplier of MES/MOM solution

Managing reticles, probe cards, and durables is critical to ensure yield and quality. Small mistakes can lead to costly production issues. With iCADA Suite, you gain the control and visibility needed to stay ahead.

Industries

Advancing Process Control and Traceability in Wafer Fabrication

Managing complex process steps, thousands of recipes, and large data volumes requires structured execution to minimize setup errors and production variability. camLine's tailored MES solutions advance process control, provide real-time insights, and ensure full traceability, enabling first-time-right results, agile adaptation, and sustained leadership in the industry.

Explore camLine solutions for semiconductor frontend
Semiconductor Frontend_solution_Modular Integration & Scalability-20250707-033808
Industries

Advancing Process Control and Traceability in Wafer Fabrication

Managing complex process steps, thousands of recipes, and large data volumes requires structured execution to minimize setup errors and production variability. camLine's tailored MES solutions advance process control, provide real-time insights, and ensure full traceability, enabling first-time-right results, agile adaptation, and sustained leadership in the industry.

Explore camLine solutions for semiconductor frontend

Let’s Discuss Solutions with camLine's Experts

Our team is ready to deliver tailored MES solutions that streamline your production, improve product quality, and maximize efficiency across your operations. Tap into camLine’s decades of expertise in digital transformation to overcome your manufacturing challenges.

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