Modeling Concepts to Sustain the Growing Complexity in Recipe Management Systems

As the manufacturing processes and the equipment become more complex, the number and the complexity of the recipes grows as well. Recipe management systems face the challenge of modelling and managing a growing number of physical recipes in a centralized manner for the complete fab.

The purpose of this paper is to introduce a set of techniques regarding data modelling and management in a recipe management system, in order to reduce the duplication of data and the risk of human errors in recipe setup for new technologies, products or production equipment instances.