camLine at SEMICON WEST 2026
Meet camLine at SEMICON West 2026 and explore semiconductor MES, SPC, recipe management, fab automation, and SmartSPC Run-to-Run control.
About this event
camLine will exhibit at SEMICON WEST 2026, taking place from October 13–15, 2026, at Moscone Center in San Francisco, California, at Booth 1245.
Presentation
Topic: SmartSPC by combining SPC and Recipe Management
Fully autonomous 200mm fab strategies: making legacy lines competitive.
During the SEMI Smart Manufacturing Session, Jochen Kinauer, Director Channel Sales & Public Relations at camLine, will present how SmartSPC combines Statistical Process Control, Recipe Management, and configurable controllers to enable automated Run-to-Run (R2R) process control.
The presentation will show how SmartSPC uses process data and predictive calculations to automatically tune recipe parameters within a closed-loop workflow. It will also share experience from a successful SmartSPC deployment for a CMP process in a legacy semiconductor manufacturing environment, including implementation challenges and lessons learned.
Event Key Discussion Areas
- MES for connected production
- SPC and quality management
- Recipe management and process integrity
- Reticle and Durables Management
- Automated Run-to-Run Control with SmartSPC
- Factory Automation and Material Control System
Meet Our Team
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Bernando OspinaKey Account Manager
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Craig MattsonKey Account Manager
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Tommy YokomDirector of Business Development, camLine USA
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Jochen KinauerDirector Channel Sales & Public Relations
How can we help you? Contact Us.
FAQ
Q: How can semiconductor fabs improve process control with automated Run-to-Run control?
A: Semiconductor fabs can use automated Run-to-Run control to evaluate production data from previous runs and adjust process parameters for subsequent runs. camLine SmartSPC combines LineWorks SPACE, LineWorks RM, Advanced Calculation Option (ACO), and Recipe Objects (ROBs) to connect process data, calculations, and recipe parameters within an automated process tuning workflow.
Q: Which camLine solutions support semiconductor manufacturing operations?
A: camLine offers modular solutions for MES, SPC, recipe management, production logistics, equipment and asset management, equipment integration, advanced analytics, automated material handling, and reticle and durables management. These solutions enable end-to-end traceability and process control across semiconductor manufacturing.
Q: How does SmartSPC extend traditional SPC in semiconductor manufacturing?
A: Traditional SPC primarily helps teams monitor process behavior and identify deviations. SmartSPC extends this approach into automated process tuning by using real-time production data and advanced calculations to determine parameter adjustments and feed optimized values back into the manufacturing process through integrated recipe management. This supports more responsive Run-to-Run process control with less dependence on manual tuning.