Beyond Detection: An Engineering Roundtable on Using FDC to Identify and Understand Equipment Variation
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Overview
Why do tools running identical recipes and passing baseline qualifications still drift and cause downstream yield issues? How can engineering teams look beyond static scalar metrics to uncover subtle chamber-to-chamber variation before excursions happen?
In the second session of our LineWorks FDC webinar series, guest expert Dr. Puneet Khanna from Texas Instruments joins camLine experts Tom Yokom, Shane Melancon, Craig Mattson, and Steven Meyer for an engineering roundtable.
Moving beyond basic alarm limits, the panel explores how high-frequency trace curve profiles, dynamic step analysis, and chamber matching provide early root-cause visibility across production fleets.
What You'll Learn
- Why equipment running the same recipe can still behave differently
- What trace data can reveal that scalar values and summary metrics may not
- How engineers can use trace profiles and process-step context to investigate variation
- How tool-to-tool and chamber-to-chamber comparisons can support engineering analysis
- What teams should consider when trying to distinguish equipment, process, sensor, or maintenance-related variation
- How FDC can help engineers move from detecting an abnormal condition toward a more focused investigation
Who Should Attend?
This session is designed for manufacturing and engineering professionals who want a better understanding of FDC and its role in semiconductor manufacturing, including equipment, process and quality engineers, APC/SPC specialists, and manufacturing operations and engineering leaders.
Part of the LineWorks FDC Webinar Series
This is the second session in our ongoing LineWorks FDC webinar series, bridging foundational fault detection concepts with practical engineering root cause to prepare for advanced hands-on demonstrations.
Webinar speakers
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Dr. Puneet KhannaFactory Controls Engineer, Texas Instruments
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Tom YokomStrategic Solution & Business Development Lead
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Craig MattsonKey Account Manager
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Shane MelanconSolutions Architect
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Steven MeyerCEO camLine USA & Sales Director North America