White paper

The Implementation of Single Source Recipe Management System in Semiconductor Manufacturing

This white paper explains how a semiconductor manufacturer established centralized control over recipe selection while retaining distinct roles for its MES, recipe management system, and equipment interface.

A Practical Semiconductor Manufacturing Implementation

Managing recipe selection becomes difficult when baseline production, experiments, rework and lot-specific exceptions depend on different systems or offline processes.

This white paper documents how onsemi implemented a recipe management system alongside its MES and equipment interface. The approach uses manufacturing context to select the appropriate approved recipe while preserving traceability across production scenarios.

The paper covers the implementation architecture, recipe definition model and phased migration—not just the intended benefits.

What You Will Learn

Why the existing MES could not fully support multivariable recipe selection in photolithography
How the MES, recipe management system and equipment interface divide responsibilities.
How context keys are used to identify the appropriate recipe
How experiments, rework and lot-specific exceptions can be modeled online
How recipe templates, validation, revisioning and approval support control
Why the implementation was introduced through a phased migration

About the Author

Tom Yokom
Director of Business Development, camLine USA

Tom Yokom has 30 years of experience in semiconductor manufacturing. His work focuses on manufacturing technologies that support reliable 24/7 production, including MES, recipe management, and SPC systems. He advocates for practical, floor-proven software that helps manufacturers improve reliability, automation, and operational control.

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FAQ

Q: What does single-source recipe selection mean?

A: It means recipe-selection rules and approved recipe definitions are governed through one designated system instead of being distributed across several selection methods and offline processes.

Q: Does a recipe management system replace the MES?

A: No. In this implementation, the MES retains manufacturing context and history, the recipe management system resolves the applicable recipe, and the equipment interface delivers it to the tool.

Q: How are experiments and lot-specific exceptions handled?

A: The implementation models baseline production, experiments, rework and lot-specific processing through contextual recipe definitions. This makes these scenarios more visible and traceable than offline handling.

Q: How does the system prevent multiple recipes from being selected for the same production context?

A: The selection logic identifies the approved recipe with the most specific matching context. It returns an error if multiple recipes match with the same level of specificity or if the selected recipe is on hold.

Q: Was the context-based recipe selection model implemented across the entire factory at once?

A: No. The manufacturer used a phased migration, allowing equipment and processes to move to the context-based recipe selection model progressively.

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