SmartSPC Solution

Run-to-run (R2R) control system for automated process tuning in semiconductor manufacturing.

Talk to our expert

Achieving Operational Excellence with SmartSPC

SmartSPC is camLine's integrated, modular automated process control system, built to empower run-to-run control in high-tech manufacturing. By combining powerful Statistical Process Control from LineWorks SPACE with robust Recipe Management System from LineWorks RM, SmartSPC automates process tuning, ensuring unparalleled precision and consistency. 

Explore SmartSPC core components
contact-placeholder
We’re here to help you achieve manufacturing excellence. Contact camLine

Trusted by Leading Manufacturers Worldwide

Logos_GlobalFoundries
Logos_infineon
Logos_XFAB
Logos_soitec
Logos_ams-20250829-092441 (1)
Logos_skyworks
Logos_nxp
Logos_azur space-20250829-092549 (1)
Logos_stmicroelectronics
Logos_continental

Overcoming Process Control Challenges in High-Tech Manufacturing

High-tech manufacturing, particularly in sectors like semiconductors, often relies on fixed process recipes combined with traditional statistical process control. This can lead to manual intervention and reactive adjustments, resulting in slower responses, increased scrap, and suboptimal production outcomes.

To excel in manufacturing, higher levels of precision and accuracy are essential, requiring tighter process control. Automated process control is therefore becoming a critical component to improve performance, yield, throughput, and flexibility, utilizing run-to-run, wafer-to-wafer, within-wafer, and real-time process control strategies.

Automated Process Tuning and Control System

Core components

SmartSPC automates process tuning by integrating LineWorks SPACE, LineWorks RM, and other components like Advanced Calculation Option (ACO) and Recipe Objects (ROBs). Using real-time data and advanced calculations, it optimizes process parameters for faster, more accurate adjustments. This helps achieve better process results, maintain consistent product quality, and improve production yield and efficiency.

SmartSPC Landing Page_graphic_SmartSPC

SmartSPC Architecture: Core Components

  • The powerful SPC tool for comprehensive data collection and advanced calculations, handling metrology, process, and controller calculated data.

    Explore LineWorks SPACE

  • For robust recipe management, ensuring process integrity and precise parameter control.

    Explore LineWorks RM

  • A key component within LineWorks SPACE enabling automated process tuning through advanced data calculations for parameter optimization.

  • A key component of LineWorks RM that retrieves optimized parameter values in real-time for recipe adjustments.

  • The RM Integration Layer (RIL) facilitates the robust and seamless integration between LineWorks RM and LineWorks SPACE, forming the backbone of the efficient R2R control loop.

  • Integration point for real-time data exchange with your process and measurement equipment.

3-Stage process

How SmartSPC Automates R2R Control

SmartSPC elevates R2R control through its intelligent 3-stage process, significantly advancing automated process tuning between production runs by using data collected from previous runs.

  • Modeling:

    The critical first step involves defining and setting the key process parameters and calculations necessary for optimized control.

  • Real-time Data Collection:

    Utilizing ACO from LineWorks SPACE, SmartSPC gathers precise production data and applies it to the previously defined model..

  • Process feedback:

    The evaluation of calculated results from the model to determine whether the production outcome meets the desired targets—enabling adjustments if necessary.

Read more in our SmartSPC blog post
SmartSPC Landing Page_graphic_R2R Control

Key Benefits of Automated Process Tuning with SmartSPC

While traditional SPC primarily focuses on manual tuning to reduce out-of-spec (OOS) or out-of-control (OOC) products and scrap, SmartSPC achieves this transformation by consistently driving process control through automated real-time adjustments.

Streamlined Operations

Automated process tuning through integrated ACO and ROBs ensures optimal production outcomes efficiently.

Optimized Recipe Management

With tuneable parameters through SmartSPC and integrating with LineWorks RM, recipe adjustments are made automatically based on real-time data.

Reduced Defects

Minimize process drift and variation between runs, leading to lower defects and higher yield rates.

Improved Quality

Consistently meet high product quality standards across every batch with optimized tool recipe parameters.

Enhanced Process Capability (Cpk)

Improve Cpk by maintaining process stability through immediate fine-tuning and minimizing variability.

Advanced Technical Capabilities

SmartSPC is built on a robust architecture designed for the complexities of modern manufacturing, providing unparalleled flexibility and control.

Advanced Calculation Option (ACO)

The advanced features of ACO from LineWorks SPACE include:

  • Autocharting—Automatically charts calculated and intermediate parameters by creating channels based on defined population hierarchy.
  • Application Programming Interface (API) call to retrieve samples using population lookup logic.
  • Retrieve parameter values or equipment constants from RMS.

Recipe Objects (ROBs)

ROBs from LineWorks RM provide key functions including:

  • Storing process parameters and equipment constant values used in calculations during automated process tuning.
  • Defining SmartSPC tuning parameters and configuration to define how SmartSPC behaves.
  • Uniquely matching the corresponding SPC channel for precise process control.

Let's Discuss Solutions

Talk to our expert

camLine_Solution_lets discuss solutions_202510_Internal-20251021-133253

Our team is ready to deliver tailored MES/MOM solutions that streamline your production, improve product quality, and maximize efficiency across your operations. Tap into camLine’s decades of expertise in digital transformation to overcome your manufacturing challenges.

Frequently Asked Questions

FAQ

  • Run-to-run control is needed when fixed recipes and manual adjustments cannot respond quickly or consistently enough to process drift between production runs. SmartSPC uses process and metrology data to support controlled parameter tuning for subsequent runs.

  • Traditional SPC identifies abnormal variation and signals when intervention may be required. SmartSPC extends this approach by calculating tuning values and using recipe management to apply controlled parameter adjustments between production runs.

  • SmartSPC applies a defined process model to production and metrology data collected from previous runs. It evaluates the calculated result against the required target and determines whether recipe parameters should be adjusted for the next run.

  • SmartSPC uses LineWorks RM and Recipe Objects to manage the optimized parameter values used for recipe adjustment. The RM Integration Layer connects recipe management with the calculations performed in LineWorks SPACE, maintaining a governed control loop rather than making unmanaged equipment changes.

  • A run-to-run control module such as SmartSPC combines LineWorks SPACE for SPC and advanced calculations with LineWorks RM for recipe and parameter management. Its architecture also uses the Advanced Calculation Option, Recipe Objects, the RM Integration Layer, and an Equipment Interface.

  • Yes. SmartSPC includes an Equipment Interface for exchanging data with process and measurement equipment. The exact integration requirements depend on the available equipment interfaces, process data, metrology data, and the control model selected for the manufacturing process.

camLine
Leading global supplier of MES/MOM solution

SmartSPC significantly enhances process capability (Cpk) and supports more stable, efficient, and predictable manufacturing performance.

Industry Insights and Customer Stories

Explore our resource library to discover how camLine supports high-tech manufacturers in enhancing quality, efficiency, and reliability.
Explore more insights

Let’s Discuss Solutions with camLine's Experts

Our team is ready to deliver tailored MES solutions that streamline your production, improve product quality, and maximize efficiency across your operations. Tap into camLine’s decades of expertise in digital transformation to overcome your manufacturing challenges.

Talk to our expert